1. Main Unit
Power Supply : 200V 3phase 14KVA
Size : 1,500(W)x700(D)x1,400(H) *Patlite(400(H)) is excluded
• Touch panel
Size : 350(W)x250(D)x400(H)
Automatic Temp. Control : 5 set
• Vaporizer
Size : 90(A)xL370
Vaporizer Temp is feedback control by hamber value
• Pyrolizer
Size : 50(A)xL1,076
Heater Size : ID90xOD290xL950 |
2. Deposition Chamber
Type: 0800V
• Chamber
Size : ID800xH800
Acrylic lid : Rotary slided type
Rotation : 0.5~20rpm
Capacity : Max 300 Kg
Turn table : 5 Rack layer
Accessories : intake and out rectification, flat type chamber heater (2 set), wheels and fix unit |
3. Chiller Unit
Main trap size : 200AxL250
Handy cooler : Thomas
Cooling coil size : ø150Axø8x12roll
Trap size : ø170xL265
Ability : -75~-85C |
4. Vacuum Pump
Type : ULVAC EC603
Ability : 1,000 L/min (50/60Hz)6.7x10-1pa
Accessories : electric valve, anti oil back valve, pirani gauge, connection tube, oil mist trap |