1. Main Unit 
          Power Supply : 200V 3phase 14KVA 
          Size : 1,500(W)x700(D)x1,400(H)    *Patlite(400(H)) is excluded 
• Touch panel 
          Size : 350(W)x250(D)x400(H) 
          Automatic Temp. Control : 5 set 
• Vaporizer 
          Size : 90(A)xL370 
          Vaporizer Temp is feedback control by hamber value 
• Pyrolizer 
          Size : 50(A)xL1,076 
          Heater Size : ID90xOD290xL950  | 
                      
                      
                        2. Deposition Chamber 
        Type: 0800V 
• Chamber 
        Size : ID800xH800 
        Acrylic lid : Rotary slided type  
        Rotation : 0.5~20rpm 
        Capacity : Max 300 Kg   
        Turn table : 5 Rack layer    
        Accessories : intake and out rectification, flat type chamber heater (2 set), wheels and fix unit  | 
                      
                      
                        3. Chiller Unit 
        Main trap size : 200AxL250 
        Handy cooler : Thomas 
        Cooling coil size : ø150Axø8x12roll 
        Trap size : ø170xL265  
        Ability : -75~-85C | 
                      
                      
                        4. Vacuum Pump 
        Type : ULVAC EC603 
        Ability : 1,000 L/min (50/60Hz)6.7x10-1pa 
        Accessories : electric valve, anti oil back valve, pirani gauge, connection tube, oil mist trap |